The Fluid Simulation of Radio Frequency Plasma Chamber
碩士 === 國立中央大學 === 機械工程學系 === 85 === This article used the numerical methods to solve the Boltzmann equation and to simulate the nature of radio frequency plasma chamber in the conditions of low pressure(less than a little Torr) and weak i...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1997
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| Online Access: | http://ndltd.ncl.edu.tw/handle/81465456936098581777 |