Surface Acoustic Wave Properties of AlN Films Deposited on SiO2/Si Substrates
碩士 === 國立中山大學 === 電機工程研究所 === 85 === The surface acoustic wave (SAW) devices play an important role for communication system and signal processing. In this thesis, we tried to deposit highly c-axis oriented AIN films with smooth surfaces, good adhesion and strong piezoelectricity on SiO2/Si substra...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1997
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/44652916710972724812 |