An Investigation of Polarization Fatigue for Ferroelectric Thin Film Capacitors
碩士 === 國立清華大學 === 物理學系 === 85 === The effect of fatigue on the leakage current of PZT thin film capacitorswas analyzed. The change of polarization is correlated to the stresselectric field and the fatigue cycles. It is found that there is n...
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
1997
|
Online Access: | http://ndltd.ncl.edu.tw/handle/82830427533488370200 |