Propert and reliability study on the ultra-thin oxides (3-5nm) grown by microwave plasma afterglow oxidation at low temperature in the mixtures of N2O and O2
碩士 === 國立清華大學 === 電機工程學系 === 85 ===
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1997
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| Online Access: | http://ndltd.ncl.edu.tw/handle/36987175125434281765 |