A Study of Silicon Based CH4 Microsensor
碩士 === 國立清華大學 === 電機工程學系 === 85 === In this research, we will design and fabricate a methane microsensor . We design a new silicon based gas sensor structure, silicon as the substrate material, a heater, a temperature sensor, and utilize a...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1997
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| Online Access: | http://ndltd.ncl.edu.tw/handle/87227989436508376159 |