| Summary: | 碩士 === 國立清華大學 === 電機工程學系 === 85 === In this research, we will design and fabricate a methane
microsensor . We design a new silicon based gas sensor
structure, silicon as the substrate material, a heater, a
temperature sensor, and utilize a catalyst to improve the
sensitivity and selectivity of specific gas sensing. The basic
principle is to measure the heat generation as a result of
catalytic chemical reaction between the sensing material and the
gas to be sensed. The sensor will consist of a heater, a
temperature, a gas sensing functional thin film, and a thin film
catalyst. The key technologies is KOH anisotropic etching and
etching through. All these elements of the sensor are deposited
on the silicon substrate which has a thin membrane for
appropriate thermal isolation to have good device performance.
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