Study of the peripheral leakage current of shallow junction
碩士 === 國立清華大學 === 電機工程學系 === 85 === The purpose of this paper is to know that different thickness TiNwhich variations of stress to different size of contact hole willhave any changes on shallow junction leakage current.we use ionimplant thr...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1997
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| Online Access: | http://ndltd.ncl.edu.tw/handle/09035530301085606660 |