Thermal Stability of Ag and Ag/Au Thin Films on TiSi2, TiN BPSG Substrates
碩士 === 國立清華大學 === 材料科學工程研究所 === 85 === The thermal stability of Ag and Ag/Au on different substrates has been investigated by transmission electron microscopy, scanning electron microscopy, Auger electron spectroscopy, and sheet resistance measurements. Ti thin films (~ 3 nm and ~ 10 nm) were f...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1997
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| Online Access: | http://ndltd.ncl.edu.tw/handle/87379576910025106441 |