Improvement on the Electrical Properties of In-situ Phosphorus Doped Hydrogenated Polycrystalline Silicon Thin Films Grown by Low Temperature ECR-CVD
碩士 === 國立清華大學 === 電機工程學研究所 === 85 === Low temperature fabrication of polycrystalline silicon thin film transistors (poly-Si TFTs), solar cells and other semiconductor memory application is the new trend of development in recent years. Our group has succeeded to grow large grain undoped poly-si...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
1997
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| Online Access: | http://ndltd.ncl.edu.tw/handle/82889998031867714263 |