Improvement on the Electrical Properties of In-situ Phosphorus Doped Hydrogenated Polycrystalline Silicon Thin Films Grown by Low Temperature ECR-CVD

碩士 === 國立清華大學 === 電機工程學研究所 === 85 === Low temperature fabrication of polycrystalline silicon thin film transistors (poly-Si TFTs), solar cells and other semiconductor memory application is the new trend of development in recent years. Our group has succeeded to grow large grain undoped poly-si...

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Bibliographic Details
Main Authors: Lee, Ruh-San, 李日參
Other Authors: Hwang, Huey-Liang
Format: Others
Language:zh-TW
Published: 1997
Online Access:http://ndltd.ncl.edu.tw/handle/82889998031867714263

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