Semiconductor gratings for dispersion compensation and temperature measurement
碩士 === 國立臺灣大學 === 光電工程學研究所 === 85 === Semiconductor gratings with periods ranging from 180 nm to 550 nm were successfully fabricated using prism interferometry. Besides the conventional etching technique,we discovered an direct ablation process for fabricating short-perio...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
1997
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| Online Access: | http://ndltd.ncl.edu.tw/handle/52742403753442672355 |