The Study of Hydrogenated Amorphous Silicon Germanium Alloys Prepared by PECVD
碩士 === 國立臺灣大學 === 電機工程學系 === 85 === Hydrogenated amorphous germanium alloys (a-SiGe:H) have been prepared by plasma enhanced chemical vapor deposition (PECVD). The structural, electrical and optical properties of the films have been stu...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
1997
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| Online Access: | http://ndltd.ncl.edu.tw/handle/98609769216164971847 |