Viscous Dissipation Energy Model for Laterally Driven Oscillating Microstructure.
碩士 === 國立臺灣大學 === 應用力學研究所 === 85 === The present study investigates the ambient fluid situation for the laterally driven oscillating microstructure , which is frequently used in MEMS. We also investigate fluid viscous dissipation and the quality factor of...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1997
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| Online Access: | http://ndltd.ncl.edu.tw/handle/51851406372203660469 |