Simulation, Design and Control of the Rapid Thermal Processor
碩士 === 國立台灣工業技術學院 === 化學工程技術研究所 === 85 === The continuing downscaling of design features in VLSI/ULSI circuitsplaces a challenging demand on the semiconductor manufacturingtechnology. Rapid thermal processing (RTP) offers a grow...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
1997
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| Online Access: | http://ndltd.ncl.edu.tw/handle/90225221202644378664 |