Contact Force Control of Automatic Polishing System
碩士 === 淡江大學 === 機械工程學系 === 85 === A scheme for the measurement and control of contact force in the automatic polishing systems is developed and describedin this thesis. In the conventional automatic polishing systems contact force is generally measured wi...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
1997
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Online Access: | http://ndltd.ncl.edu.tw/handle/75964681150891502574 |