Contact Force Control of Automatic Polishing System

碩士 === 淡江大學 === 機械工程學系 === 85 === A scheme for the measurement and control of contact force in the automatic polishing systems is developed and describedin this thesis. In the conventional automatic polishing systems contact force is generally measured wi...

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Bibliographic Details
Main Authors: Shen, Yu-Cheng, 沈育正
Other Authors: Sheng-Ming Yang
Format: Others
Language:zh-TW
Published: 1997
Online Access:http://ndltd.ncl.edu.tw/handle/75964681150891502574