The study of structure and defect of the SiO2 film and Si-SiO2 interface on silicon substrate in optical measuring
博士 === 中正理工學院 === 國防科學研究所 === 86 === The integrated circuits (IC) based on silicon substrate play a main role hitherto in the semiconductor industry and the IC devices can*t be fabricated without SiO2 films. Since the operating performance of the devices is related c...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1998
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| Online Access: | http://ndltd.ncl.edu.tw/handle/54758852363948922803 |