Preparation and Characterization of Conductive Indium Tin Oxide Thin Films by RF Sputtering Using Sol-Gel Derived Target
碩士 === 長庚大學 === 化學工程研究所 === 86 === The focus of this research is promote the properties of sputter -deposited indium tin oxide (ITO) thin films produced by using targets prepared by high quality sol-gel derived powders. In add ition to the processing conditions durin...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1998
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| Online Access: | http://ndltd.ncl.edu.tw/handle/77772713558125525204 |