A Model of Circular Defects Distribution on Wafer Map
碩士 === 中華大學 === 電機工程學系 === 86 === This paper is described a moder for Circular Defects Distribution on Wafer Map by cylindrical coordinates. It makes Defects Distribution on Wafer Map become more observable than analyse in cartesian coordinates From real experiences, a original mathematical model...
Main Author: | |
---|---|
Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
1998
|
Online Access: | http://ndltd.ncl.edu.tw/handle/93921128497056425980 |