A Model of Circular Defects Distribution on Wafer Map
碩士 === 中華大學 === 電機工程學系 === 86 === This paper is described a moder for Circular Defects Distribution on Wafer Map by cylindrical coordinates. It makes Defects Distribution on Wafer Map become more observable than analyse in cartesian coordinates From real experiences, a original mathematical model...
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| Format: | Others |
| Language: | zh-TW |
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1998
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| Online Access: | http://ndltd.ncl.edu.tw/handle/93921128497056425980 |
| Summary: | 碩士 === 中華大學 === 電機工程學系 === 86 === This paper is described a moder for Circular Defects Distribution on Wafer Map by cylindrical coordinates. It makes Defects Distribution on Wafer Map become more observable than analyse in cartesian coordinates From real experiences, a original mathematical model of Distribution of Defects on a Wafer Map is presented It's called "Whirlpool Model for Wafer Map"
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