A Model of Circular Defects Distribution on Wafer Map

A Model of Circular Defects Distribution on Wafer Map

碩士 === 中華大學 === 電機工程學系 === 86 === 　　This paper is described a moder for Circular Defects Distribution on Wafer Map by cylindrical coordinates. It makes Defects Distribution on Wafer Map become more observable than analyse in cartesian coordinates From real experiences, a original mathematical model...

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Main Author: 吳皓然
Other Authors: 陳竹一
Format: Others
Language:zh-TW
Published: 1998
Online Access:http://ndltd.ncl.edu.tw/handle/93921128497056425980
id ndltd-TW-086CHPI3442005
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spelling ndltd-TW-086CHPI34420052016-01-22T04:17:04Z http://ndltd.ncl.edu.tw/handle/93921128497056425980 A Model of Circular Defects Distribution on Wafer Map 晶圓平面瑕疵圖的螺旋分布現象 吳皓然 碩士 中華大學 電機工程學系 86 　　This paper is described a moder for Circular Defects Distribution on Wafer Map by cylindrical coordinates. It makes Defects Distribution on Wafer Map become more observable than analyse in cartesian coordinates From real experiences, a original mathematical model of Distribution of Defects on a Wafer Map is presented It's called "Whirlpool Model for Wafer Map" 陳竹一 1998 學位論文 ; thesis 30 zh-TW
collection NDLTD
language zh-TW
format Others
sources NDLTD
description 碩士 === 中華大學 === 電機工程學系 === 86 === 　　This paper is described a moder for Circular Defects Distribution on Wafer Map by cylindrical coordinates. It makes Defects Distribution on Wafer Map become more observable than analyse in cartesian coordinates From real experiences, a original mathematical model of Distribution of Defects on a Wafer Map is presented It's called "Whirlpool Model for Wafer Map"
author2 陳竹一
author_facet 陳竹一
吳皓然
author 吳皓然
spellingShingle 吳皓然
A Model of Circular Defects Distribution on Wafer Map
author_sort 吳皓然
title A Model of Circular Defects Distribution on Wafer Map
title_short A Model of Circular Defects Distribution on Wafer Map
title_full A Model of Circular Defects Distribution on Wafer Map
title_fullStr A Model of Circular Defects Distribution on Wafer Map
title_full_unstemmed A Model of Circular Defects Distribution on Wafer Map
title_sort model of circular defects distribution on wafer map
publishDate 1998
url http://ndltd.ncl.edu.tw/handle/93921128497056425980
work_keys_str_mv AT wúhàorán amodelofcirculardefectsdistributiononwafermap
AT wúhàorán jīngyuánpíngmiànxiácītúdeluóxuánfēnbùxiànxiàng
AT wúhàorán modelofcirculardefectsdistributiononwafermap
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