Thermal stress analysis of semiconductor wafers in rapid thermal processing
碩士 === 國立成功大學 === 機械工程學系 === 86 === Thermal stresses are an important consideration in production processes involving large temperature changes. Recently, Thermal stresses have also become significant in semiconductors related to wafers....
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| Format: | Others |
| Language: | zh-TW |
| Published: |
1998
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| Online Access: | http://ndltd.ncl.edu.tw/handle/88438136622610522548 |