Design of Monolithic-Silicon Micro-Pressure Sensors
碩士 === 國立成功大學 === 機械工程學系 === 86 === Micro-devices can be manufactured due to recent active development ofmicro-electro-mechanical system ( MEMS ) process technique. In this thesis,a monolithic silicon micro-pressure sensor with a four-terminal shear stres...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
1998
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Online Access: | http://ndltd.ncl.edu.tw/handle/53851000344359864715 |