Design of Monolithic-Silicon Micro-Pressure Sensors

Design of Monolithic-Silicon Micro-Pressure Sensors

碩士 === 國立成功大學 === 機械工程學系 === 86 === Micro-devices can be manufactured due to recent active development ofmicro-electro-mechanical system ( MEMS ) process technique. In this thesis,a monolithic silicon micro-pressure sensor with a four-terminal shear stres...

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Bibliographic Details
Main Authors:	Chen, Gin-Shine, 陳景欣
Other Authors:	Ming-Shaung Ju, Ren-Jung Chang
Format:	Others
Language:	zh-TW
Published:	1998
Online Access:	http://ndltd.ncl.edu.tw/handle/53851000344359864715

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