Ion Implantation Simulation Using Stepwise Boltzmann Transport Equation-Physical Models and Numerical Techniques
博士 === 國立交通大學 === 電子工程學系 === 86 === In this dissertation, we have developed some physical models and numerical techniques for stepwise Boltzmann transport equation (BTE) simulations. They are the rational function fitting of the nuclear scattering cross-s...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
1998
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| Online Access: | http://ndltd.ncl.edu.tw/handle/83529562202123874582 |