The Construction of a Pseudo Fab. Based on PROMIS System
碩士 === 國立交通大學 === 工業工程與管理研究所 === 86 === MES (Manufacturing Execution System) is an important element in performing real time monitoring and control in the operations of a wafer fab. PROMIS system is a proprietary MES software which is widely used in wafer fabs. To help users understand the operat...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
1998
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Online Access: | http://ndltd.ncl.edu.tw/handle/71128927225413279305 |