A Study of Via Formation in Polymide Dielectric
碩士 === 國立交通大學 === 材料科學與工程研究所 === 86 === In this work we studied the via formation in Du Pont PI-2555 Polyimide by employing the wet chemical etching and reactive ion etching (RIE) processes. Experimental results indicated that wet etching was a very fast (etching rate≡0.17∼1.08um/sec), simple,...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1998
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| Online Access: | http://ndltd.ncl.edu.tw/handle/99529610413556042079 |