The Design and Fabrication of the Micro Force Sensor
碩士 === 國立交通大學 === 機械工程研究所 === 86 === In this thesis, we present a micro force sensor fabricated by the standard IC technology. The micro force sensor based on using the piezoresistant material as a variable resistance. Because its resistance change is directly proportional to the stress applied o...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
1998
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| Online Access: | http://ndltd.ncl.edu.tw/handle/29508450553234664416 |