Spectrum Analysis of Heating Source in Rapid Thermal Processing Furnaces
碩士 === 國立交通大學 === 機械工程研究所 === 86 === Rapid thermal processing (RTP) has become a key technology in the fabrication of advanced semiconductor devices. As RTP becomes the accepted technology for an increasingly wide range of processes in device fabrication, the understanding of the physics and prop...
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| Format: | Others |
| Language: | zh-TW |
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1998
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| Online Access: | http://ndltd.ncl.edu.tw/handle/06496288336131216751 |