Adjustable Emission Emitted from Silicon-Rich-Oxide Film Fabricated by Plasma Enhanced Chemical Vapor Deposition with N2O/Ar Dilution Method
碩士 === 國立清華大學 === 電機工程研究所 === 86 === Observation of visible photoluminescence in silicon nanostructure embedded in sio2 film has recently attracted considerable interest in silicon-based optoelectronic application.We have fabricated light emitting silicon rich oxide (SRO) films that may contain n...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
1998
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| Online Access: | http://ndltd.ncl.edu.tw/handle/93798017800118611943 |