Interfacial reactions of gold thin films on silicon and materials issues of au metallization in ULSI devices

Interfacial reactions of gold thin films on silicon and materials issues of au metallization in ULSI devices

博士 === 國立清華大學 === 材料科學工程學系 === 86 ===

Bibliographic Details
Main Author:	陳志榮
Other Authors:	陳力俊
Format:	Others
Language:	zh-TW
Published:	1997
Online Access:	http://ndltd.ncl.edu.tw/handle/19371266840153375548

Internet

http://ndltd.ncl.edu.tw/handle/19371266840153375548