Dual Ion/Electron Point Source for Focused Ion/Electron Beam System
碩士 === 國立臺灣大學 === 物理學系 === 86 === A dual ion/electron point source has been presented. For ion emi- ssion, the source is operated as a well-known liquid metal ion source. For electron emission, the emitter is first prepared with a quenching...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
1998
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| Online Access: | http://ndltd.ncl.edu.tw/handle/01992642686305929079 |