The fabrication of capacitive accelerometer by surface micromachining
碩士 === 國立臺灣大學 === 電機工程學系研究所 === 86 === Abstract In this thesis, a visible, movable capacitive accelerometer of comb structure has been primarily fabricated in Taiwan. Capacitive accelerometer was designed and fabricated. The polysilicon fil...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
1998
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| Online Access: | http://ndltd.ncl.edu.tw/handle/41962271986679305966 |