Thin gate oxide prepared by anodization in pure water and rapid thermal treatment
碩士 === 國立臺灣大學 === 電機工程學系 === 86 === This paper discusses about the properties of oxide prepared by anodization and rapid thermal treatment.
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | en_US |
Published: |
1998
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Online Access: | http://ndltd.ncl.edu.tw/handle/37514642751110064140 |