Thin gate oxide prepared by anodization in pure water and rapid thermal treatment

碩士 === 國立臺灣大學 === 電機工程學系 === 86 === This paper discusses about the properties of oxide prepared by anodization and rapid thermal treatment.

Bibliographic Details
Main Authors: Hong, Chau-Ching, 洪朝基
Other Authors: Jenn-Gwo Hwu
Format: Others
Language:en_US
Published: 1998
Online Access:http://ndltd.ncl.edu.tw/handle/37514642751110064140