A Study and Control on Wafer Temperature Distribution in a Rapid Thermal Processes
碩士 === 國立臺灣大學 === 機械工程學系 === 86 === A Study and Control on Wafer Temperature Distribution in a Rapid Thermal Processes Abstract In a rapid thermal process, the temperature distribution on a wafer surface directly influences the film deposi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1998
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| Online Access: | http://ndltd.ncl.edu.tw/handle/40092294964760209670 |