Design and Performance of a Deep-UV Stepper
碩士 === 國立臺灣大學 === 機械工程學系研究所 === 86 === Recently, the needs for precise micropositioning arise in many fields of res earch and technology, such as in cellular biology, opto-electronics, and SXM ( scanning tunneling microscopy or scanning probe microscopy). The requiremen...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
1998
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| Online Access: | http://ndltd.ncl.edu.tw/handle/02821468145207235984 |