Design and Fabrication of Electrostatic Actuators with Circular Corrugated Diaphragms Using Wet Etching Technique
碩士 === 國立臺灣大學 === 應用力學研究所 === 86 === The objective of this thesis is to design and fabricate electrostatic actuators formed by circular corrugated diaphragms ( CCDs ) using wet etching technique. The actuators consist of two electrode...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
1998
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| Online Access: | http://ndltd.ncl.edu.tw/handle/94028045966975023732 |