Microfabrication of Hemispherical Polysilicon Shells
碩士 === 國立臺灣大學 === 應用力學研究所 === 86 === MEMS is still in the developing stage, especially the techniques of machining curve surfaces. The technology of making a hemisphere in silicon wafer will be applied to fabricate micro hemispherical shell...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
1998
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| Online Access: | http://ndltd.ncl.edu.tw/handle/37538997913016121700 |