The Study of SnO2 Thin Films Gas Sensors Prepared by PECVD
碩士 === 大同工學院 === 材料工程研究所 === 86 === In this study, the sensor was fabricated by using PECVD process and Tetramethyltin and O2 as precusors ; further, SnO2 thin films were deposited on comb-shaped electrode. To stabilize the microstructure and electrical properties of gas sensors, thin fil...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1998
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| Online Access: | http://ndltd.ncl.edu.tw/handle/59914601892024992218 |