Sol-Gel Derived PZT Thin Film on Si Substrate with MgO Seed Layer Deposited by RF Magnetron Sputtering for SAW Application
碩士 === 大同工學院 === 電機工程研究所 === 86 ===
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1998
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| Online Access: | http://ndltd.ncl.edu.tw/handle/78064093036648899338 |