STUDY OF POST-TREATMENT EFFECTS ON LOW DIELECTRIC-CONSTANT POLY-ARYLENE ETHERS(PAE-2)
碩士 === 國立雲林科技大學 === 電子與資訊工程技術研究所 === 86 === Low dielectric constant insulator has became a requirement in order to redu cecapacitance delay, power cousumption and cross talk when the devices scaled downto sub-micro regime. A novel PAE-2 (poly arylene ethers) has developed on inter-metal d...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1998
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| Online Access: | http://ndltd.ncl.edu.tw/handle/89462092692440793957 |