Studying and researching the strategies to improve the uniform temperature of rapid thermal processing
碩士 === 國立中正大學 === 化學工程研究所 === 87 === The thermal processing plays an important role of integrated circuit fabrication. It can not only supply the heat to make the chamber achieving high temperature, but utilize the thermal annealing process for removing the defects during processing. In r...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/71183727383971127487 |