The Study of Fast Neutron Irradiation on Intrinsic Gettering Processes
碩士 === 中原大學 === 電子工程學系 === 87 === One of the main sources of bulk and surface defects is oxygen precipitation, a correlation between device yield reduction and oxygen precipitation has been directly evidenced. Nevertheless, oxygen precipitation formed far from the epi-substrate interface,...
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| Format: | Others |
| Language: | en_US |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/05040819108352705071 |