The study of high dielectric (Ba,Sr)TiO3 thin film deposited by rf magnetron co-sputtering
碩士 === 中原大學 === 電子工程學系 === 87 === This thesis is to study the fabrication process of (Ba,Sr)TiO3 (ie: BST) thin films by radio frequency co-sputtering. BST has attracted increasing interest for the application of capacitor cells in DRAMs because of the properties of high dielectric consta...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/41853847264183127018 |