Characteristics of thermal annealing on Nd-doped AlGaAs epitaxial layer grown by liquid phase epitaxy
碩士 === 中原大學 === 電子工程學系 === 87 === In this study, the characteristic of the rare-earth element Nd-doped AlGaAs epitaxial layer grown by liquid phase epitaxy was investigated as a function of anneal temperatures. The optimum anneal conditions was found first in this report. In vi...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/08770719063704748064 |