Metal Induced Crystallization of Amorphous Silican

碩士 === 國立中興大學 === 材料工程學研究所 === 87 === Semiconductor plays more and more important role in recent twenty years. With the advances of technology for semiconductor fabrication, the development of thin film transistor (TFT) also makes a lot of progresses. For example, TFT LCD has smaller volu...

Full description

Bibliographic Details
Main Authors: Y. Peng, 彭堯
Other Authors: C. J. Tsai
Format: Others
Language:zh-TW
Published: 1999
Online Access:http://ndltd.ncl.edu.tw/handle/44552762883930152472