遠紫外線光酸增幅型正型光阻劑之合成及特性研究
碩士 === 國立成功大學 === 化學工程學系 === 87 === tert-Butyl methacrylate(TBMA) was copolymerized with various comonomers which were selected from MMA, n-BA, MAA, AA, HEMA, VAc. From film physical properties, poly(TBMA-co-HEMA) and poly(TBMA-co-AA-co-n-BA) were selected as resin binders. To introdu...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/95894867007583944171 |