DEPOSITION OF DIAMOND-LIKE CARBON AND CRYSTALLINE C3N3 FILMS
博士 === 國立成功大學 === 化學工程學系 === 87 === Abstract Diamond-like carbon (DLC) films have attracted widespread attention due to their great potentials in high technology tribological industries. The properties of DLC film depend mainly on the ion impact energy, which is the critical factor in de...
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
1998
|
Online Access: | http://ndltd.ncl.edu.tw/handle/05314617495498377017 |