DEPOSITION OF DIAMOND-LIKE CARBON AND CRYSTALLINE C3N3 FILMS

博士 === 國立成功大學 === 化學工程學系 === 87 === Abstract Diamond-like carbon (DLC) films have attracted widespread attention due to their great potentials in high technology tribological industries. The properties of DLC film depend mainly on the ion impact energy, which is the critical factor in de...

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Bibliographic Details
Main Authors: HSU CHIA-YUAN, 許嘉元
Other Authors: HONG CHAU-NAN
Format: Others
Language:zh-TW
Published: 1998
Online Access:http://ndltd.ncl.edu.tw/handle/05314617495498377017