Research and Development of Micro Temperature Sensors
碩士 === 國立成功大學 === 航空太空工程學系 === 87 === Experiments were conducted to study different concentration effect of either boron or phosphorous implanted into a polysilicon layer and the fabrication of thermal sensors and their calibration. Two different types of thermal sensors, i.e the thermocouple type a...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/16103736088756578462 |