Deposition of AlN thin film on different substrateby RF magnetron sputtering method and characteristics analysis
碩士 === 國立成功大學 === 電機工程學系 === 87 === C-axis oriented aluminum nitride (AlN) thin films on different substrates, such as Si(100), Glass, LiNbO3, AT-cut quartz, Al2O3, are prepared by reactive RF magnetron sputtering. The dependence of highly c-axis preferred orientation of AlN thin films on various sp...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/60469943832409373106 |