Estimating the Young''s Modulus of a Micro Cantilever Beam Using a Scanning Probe Microscope
碩士 === 國立成功大學 === 製造工程研究所 === 87 === The Micro-Electro-Mechanical System (MEMS) has become an increasingly promising research domain in recent years. It shows that the more importance of the micro products in manufacturing scope. The micro cantilever beam is widely used because of its ease for des...
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| Format: | Others |
| Language: | en_US |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/74068453825462868947 |